Edm method was adopted to process b - doped diamond film and the process was studied . the morphology and composition of the machined diamond film was analyzed by sem and raman . surface roughness was measured by surface roughness tester 研究了電火花加工、電火花拋光和線切割加工摻硼金剛石膜工藝,對加工后的膜進行了sem分析、 raman分析和已加工表面粗糙度分析。